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Atomic Layer Deposition For Semiconductors by Cheol Seong Hwang, Paperback | Indigo Chapters
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Atomic Layer Deposition For Semiconductors by Cheol Seong Hwang, Paperback | Indigo Chapters
From Cheol Seong Hwang
Current price: $262.95
From Cheol Seong Hwang
Atomic Layer Deposition For Semiconductors by Cheol Seong Hwang, Paperback | Indigo Chapters
Current price: $262.95
Loading Inventory...
Size: 1 x 9.25 x 9.3
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Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device. | Atomic Layer Deposition For Semiconductors by Cheol Seong Hwang, Paperback | Indigo Chapters
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